Molecular Formula: C15H30Si3 IUPAC Name: [3,5-bis(trimethylsilyl)phenyl]-trimethylsilane SMILES: C[Si](C)(C)C1=CC(=CC(=C1)[Si](C)(C)C)[Si](C)(C)C InChI=1S/C15H30Si3/c1-16(2,3)13-10-14(17(4,5)6)12-15(11-13)18(7,8)9/h10-12H,1-9H3; InChiKey = ALVFOQHWIKQDKY-UHFFFAOYSA-N Alfa Chemistry Materials product group: Semiconductor Manufacturer data sheet |