Kalrez® Sahara™ 8475 has been specifically developed to meet the challenging requirements associated with sealing applications in semiconductor thermal processes (i.e., diffusion furnace, LPCVD, RTP, lamp anneal, etc.) It exhibits excellent thermal stability and long-term sealing performance, less IR absorption and significantly reduced outgassing properties at elevated temperatures. Kalrez® Sahara™ 8475 has good mechanical properties and is well-suited for static and low stress/low sealing force applications (e.g., quartz tube seals, ball joint seals, bell jar seals, plenum seals, etc.) A maximum continuous service temperature of 300°C is suggested. Ultrapure postcleaning and packaging is standard for all parts made of Compound 8475. Information provided by manufacturer. |