| DuPont™ Kalrez® 9300 perfluoroelastomer parts are a brown product for Dielectric (Oxide) Etch processes. It has been specifically designed for use in applications where the plasma environment is a combination of ions (“physical”) and radicals (“chemical”), i.e., where a balance of “physical” and “chemical” plasma erosion resistance is typically required. Kalrez® 9300 exhibits excellent resistance to oxygen and fluorine-based plasma and etch process chemistry. It also offers very low metals content, excellent thermal stability and mechanical strength, and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300°C is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9300 parts. Features/Benefits: - Low erosion rate and ultra-low particle generation in ion/radical dominant oxygen and fluorine-based plasmas
- Excellent resistance to etch process chemistry
- Very low metals content
- Excellent thermal stability
- Excellent mechanical strength
Suggested Applications - Gas inlet/orifice seals
- Chamber lid seals
- Isolation valve seals
- Bonded gate valves/slit valve door seals
Information provided by DuPont |
