Ultra Pure SiC (Silicon Carbide) is made via a chemical vapour deposition (CVD) process, a method that produces very uniform material. The combination of excellent thermal, electrical and chemical properties makes CVD SiC well suited to many semiconductor, LED, and optical applications. Applications: - Rapid Thermal Process (RTP) components
- Plasma Etch components
- Susceptors and Heating elements
- LED wafer carriers and cover plates
- Sputtering Targets
information provided by Morgan Advanced Materials |